gb 51037-2014 微组装生产线工艺设备安装工程施工及验收规范

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Contents1Generalprov1s1ons·············································(1)2Terms····························································(2)3Basicrequirements(43.1Constructionconditions·······································(43.2Equipmentunpacking··········································(5)3.3Equipmentmoving·············································5)3.4Equipmentinstallation·······································(6)3.5Equipmentdebuggingandcommissioning·····················(7)4Installation,debuggingandcomm1ss1onmgoflowtemperatureco-finedceramicandthickfilmsubstrateproductionprocessequipment··················(9)4.1Generalrequirements··········································(9)4.2Tapecaster···················································9)4.3Blanker·························································(10)4.4Greentapepuncher··········································(10)4.5l...,aserpuncher················································(11)4.6Viafillingmachine·············································(12)4.7Screenprinter················································(13)4.8Stackingn1achinc·············································(13)4.9Isostaticlaminator·············································(15)4.10Hotcutter···················································(15)4.11Lowtemperatureco-finedceramicboxfurnace············(16)4.12Thickfilmbeltfurnace(17)4.13Laserresistortrimmer(17)•4• 3Installation,debuggingandcommissioningofthinfilmsubstrateproductionprocessequipment············(18)5.1Generalrequirements··········································(18)5.2Magneticsputteringdepositionsystem························(18)5.3Vacuumevaporationcoppcr-coatedmachine··················(19)5.4Chemicalv<:pordepositionsystem···························(21)S.5Spincoatingandhotplatesystem···························(22)5.6Exposuremachine(23)s.7Developingsystem(2"1)5.8Reactiveionetchingmachine·································(25)5.9Chemicalmechanicalpolishingmachine·····················(26)6Installation,debuggingandcommissioningofassemblingandpackagingprocessequipment············C28)6.1G·cneraIrcquirements(28)6.2Dieattchingmachine(28)6.3Dieeutecticbonder·············································(29)6.4Eutcctic()ver1•••••••••••••••••••••••••••••••••••••••••••••••••••C29)6.5WirelJondcr···················································(30)6.6Flipchipbonder(31)6.7Plasmacleaner(31)6.8Selectivespraycoatingmachine······························(32)6.9Parallelscamwelder····························..············(32)6.10Energystoragewelder·······································(33)6.11Laserwelder················································(34)7Installation,debuggingandcommissioningofprocessinspectionequipment·································<36)7.1Generalrequirements··········································(36)7.2I)robetester···················································(36)7.3Acousticscanner·············································(37)•5• 7.43Dopticalprofiler·············································(37)7.5Automaticopticalinspector····································(38)7.6Laserthicknessgauge··········································(38)7.7X-rayscanner···················································(39)7.8Chipshearing/wirepullingtester······························(39)8Engineeringacceptance·······································C41)8.1Generalrequirements(41)8.2Handoveracceptance(41)8.3Completedacceptance(42)8.4Disposalofreject·············································(43)AppendixARecordformsofacceptanceformicro-assemblingproductionlineprocessequipmentinstallationengineering············(44)Explanationofwordinginthiscode···························(49)Listofquotedstandards··········································C50)Addition:Explanationofprovisions···························C51)•6• 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~t~Xlf~~H14(f~~~~~JI{Lt)il!frKa"~1?fQ~~8~1~~~-TZtX*,-=t~~~t4it~,~*ii-~it?£fO~~it~=-~ff~~o2.0.8.IZ:;f]liij!LJprocessinspectionJlJi:i1*fflii-it£JXiV!Ll-ii_IJl,1Sl~~i&t·itXlf~&r8"9Jf3~,R-f,1itJiJlflltJlX"~J_I"1-t$:~1~ttutff-itft";f]L1Y!LJ"Jt·"=jjttt*~*If§~M~NW,t~~~M~~MTff~~~~~~~~~tt~TZ:~#~~~~~ttutfiWffi~;f]L~tt*o•3• 3.1MBI*1*3.i.11~~13.#&19:*~~F.Jtr,1t-t14ftrmmi1~T9U*J{!.5E=1JH2{S~4~itt~,/fl-1t~ilm*t1EillJ!~iE1ffi~1-J24hl)JJ:;2ilfiljjt1L7"J2o°C----26°C;3t§xtiMjjt1L7"J3o%----7o%;4~~~~~~m~~N*~~~*;s<¥".2!Wijjtffil~JEN*$:*~*;6rmADl¥JA~$~19:~mB~ffl;7mJt-1=ii9:*1MACl;s1~rw19:titl?:ms:ii~Lct-=tf-rm!JFL4~,PTvJ1am;9~D~T~~~r?JJD~N~mB~M~~~~;1om1=Itf~~w*B"~~1mLl=.m..;,k11flJt~±1I?J1M-r;11J~~it.W!_T_~~jtfit~~ilto3.L21J&~ll*i9:-~gc?&J§I~*T35Utt*>c14:1~*~~-¥0000;2·!)[*~l~i1¥fiJl;319:*tM:©:fl}]"m1fl~B"~i5l*~~..~1-=r..gttfttt*x14E<..~~t!*~~o3.1.3JttA<¥1trmB"~JllfiIAff!ill!f{1~JttAyfj/$fK1¥JmH-TiiE"t~§}f(.I#1HtJi::ff**J{!.5Et~iiEJ:i5cBso472B"~1=I:A:*J{!.5E03.1.5J)fil.Tml¥JfJLJimzrf~ffil1-T00*IfIF{ft(1~Eg-=t-~F-~*~~.T~J)filIlZ!Ji4~~3~m))GB5O467l¥J:ff*~J{!.JEo•4• 3.2i~ti*m3.2.Iia:{t3ff§ml~N*1~~-1il-JJtgiiJI1iIEl~i&-1ilB""1~1fAIn=*t:rnJ~}JO,~JE1t1f_&8""1:it!t1i&*:if$.~#fJ5::.~l_&1-t~~1Jao3.2.2N***§*1ill~11F-EJ.#&*§~7C1ff1~Eltw~tilt,J)JrlJ~$1Elim-1tmff-tt~i~mx*?t03.2.3N1i3fffiillr4~TjUjJl!.J£:1~~ffir*lN*El~m#~m~mm~~mT,m~m~~*mH~*tl1:~Jlf!tiJ¥:it!fr;2m~*~rn~~n~ffi~~J£#€tt~$~~~m~rn~JII.l."3$~-E2~*§rn~El$5tc~~$)fm~w.1§,m1G~ili*ar*J~-=tf!LvJ)tr~1114,m14,{I}ittfr~THffi_IfF03.2.4i9:{t3ff§J§$.ElBtmr~IJFTB{J§.Y&tJt-L3.2.sN*H*§€$.t_&1tr*JWN*,r*J$§~,N{tffl14~1}~M-,~it:r~JF1ff"tffl£mliLepitt1-T~1~ic*#mm~Jlf!~%o3.2.6i9:*H*§Fn,$.~TjU~>J(~r,Dft_&11F:1~*~~~m~~mmill~N{tm-~tt*~~~~~;2i5l{t8""1)trx~f!1~1?"E2~~o~Mc~"£1,1Mt1"~~t!Rat,W.Elatm:Jj#1~M-ic~,x1-=r:ffllJmMc~"£1,miffiffiN*iMm1ft1iLfiJfJ"l~Jlf!;3illtl1:~*§1~1ft~~1~J~~14,$1tt:,_rJt.,m14,mHAtJ*45¥0~1llitt*-X14~1}1f~,*mfFtfJic~;4~~~*Hffi&~11f§,!Jsl~~~~~~~~~~~m~~14,~114,mm1itJ*4,_T-tJt.fDtt*x143t83~m1ft1iL~~03.2.7N{t3fffiill±Jt~3fffi~11Fic*,r*J~Elt~i-:W.~~:zfs:~Jr.ffi*-A.O.18""1~Jr.5Eo•5• 1~m~fflB"~m~1J1ItI~iAS¥=101kJ_tsf.J~ii;2ffi$~ftA91JHt~iiE_li5"~§~~f!Pili;s~~str!it£iM~JtfllT~J!Ji,~~1~r1:"**,111tlfJ!~o3.3.2armr=rf!N~8Jt11I7c~1l~J3.~1:r~~-It:t~1ffat,m~fflX*~~~f=(m~f1Lif"JOC19:~o3.3.311!fflX:$st"WJX5f-Kocillffili119:1ff!li,L"lOOmmk)_t03.3.4mt~ffJffi~$~~i-9:*at,~trill+~o3.3.5*ffl~m*~nt*Bt,Jli~itT91J~Jl!.JE:1~mm~~~*~$~*m~~T,&~N*~~~f=(m/G1~Y-T4/f";2~~JE~J§-JlIf~fritL~*~:giHf-E±tl!00~&/Gill1~-T2mmo3.3.6rJ%pgfJ]ti~N*at,JlZ*~~f?itf!)~izntnmo3.4.1~~Jl~i9=*B"~$:?&lill:r-O=~T9tl~~~:1~*~11Istmtmooi=g~*§~ff2:rSJfll1*ft,£t1~~rsJ;2i=g~"~m"7j(WitfOti<±illMffl-=f~lXWC1f~~~mB¥U1iL;3~?&a-1m~f?N*~m,Witua::fm~t_mfJi,~"1ili,N*~$::?&ill$rm,PTit,1JL~t~tr!:Ji?&fr5/Fm~ili~Jit~14*oo;419:*if~ilirRt£1MEX:~~~"J*:m~*st,ill*!fRx1m8"Jrw1)1{1JR9X:f£~ffe~fl~f18"JmJ1f[;sillmm~*tt*~*~~~A91~~nt*B"1=~~~~~ot~A~fkB"J~~~~lr*fflSS316L~~ffXJ1fil!,£11!7j(,ffmr~~~~~~~~fkli~lr*ffl-~-zm,-~g~~~~o3.4.21£±11!til_t]I1~!:fx.~~~J3.~~*mr4~TjLl~Jl!.JE:•6• 1mn:fr1-mooJ1~Ji£iiilimJ1,Jt·mTiffliA¥iillimJtimi~~x1$Nit;2~~~~m~¥~~~¥~mJ1_t~;3=;s:i5litWe1i~±filRtJJt~fi,!JllJill1~!ff}:~xJfilR!P~~iETiffl~A;itt~=tL9=i,f$iJJ-tl*stflll1~m~m~~;4m~M~~~~-~~x~*~~~~mJt~~~~N~zt-iJ*J+N*,:tt·mnffi*f»i~~*-RT-xr8J~,ilm~~ifilRtJJt~ri~fr±filfia"~xlfm¥EllimJtJ~o3.4.3tEFl"ITU_t1r11<12?&1~g_I:U~-JM:it@:1:4itT3JIJF~;E:I12?&N*EJ{JTft:i=1ITObiJj(+,-1JZ-.~,$~;2kookm~~~D~M~,fr~rm~D~~~*~~~nJ~o3.4.4N*8{]71<-¥11~~1L*fflfil~r.:;Jt~~t?kJf1~03.4.5i~jjJi*N*a1ttJ-tP.JJtr~~~QT:®,t~±fil51:u~m~rmttJ1g*~~1~LiiH~.-i&t*tt1-m~~Jl/G1sZ7c-r4n;t~±m*mmr4it~fi00~~~«~~~~12~I~~M~~~I~~~~m»GB5o16989~1:~Jl!.1£o3.4.6i&l*811izffimr11tz*A91~1EN*s"JiJ1flfc1r03.4.7-19:~12?&:;c.~FnDZ±JP~J12~T.fii2JR,pq~Rf~Abllf:4i;*FJl!.m*A.o.2El~~~f:Eo3.5.Ii~gJl~w*iJ~ii1=jii~ffJ~Lr4irT3fJJF~5E:INi)-}]ZB§:?&8;Jt{iz;2~·t&*ttilllEt~~fr?~JJnMc~Mc~xbi~iiEitftt*it$rID,~~iJJfJ8"1~~~~m~itN~~ffl~*;3ffi~:21=(,_T.Z~1*:ImAN~1WillZfMOff¥f1~Jlito3.5.2i~~li~Nfkfff!L1Willitt1i1fftx~~o•7• 3.5.3trt~tJB~i9:fk~1-riWmlt!1-rgc~,ti~uii,*m~JEi9:4k~ffl~*o3.5.41£:TFm~~r,mr£mftH~Et!rfiE*¥Pl~!ii-9:*8"Jrt!afOrt!rm~~~fli9:fkfl!fflB"J~>Jt03.5.5~fk1£7ffll~0r,1£A911*ft:1ilJllrt~~~:i:i!~A%~UA@fii~lijc~70dBo3.5.6i-9:*ml!~xt~~~fr48h,l!~~1-riru,§m*1-r~*±~,t1:~~t~t~r»l~ii,1Pl~ii~a*m~iti9:*tt*t~t~a~~*03.5.11~til?&~fk!fitJLiijgfrm±Jt~iftilii~iijgfric)R,!fiVUJ~Jii~ii~fim**mmm4-~m7-~~~~~*fi,e~B"Jl*J~Bd~~:ct:m~it*~~m*A.o.3l¥J~,fil~o•8• 4M~~~-~HWm~fi~mI~19:~~~"iJliiHii~1-r4.1.11Itt=ttt:~~tJ~ElW~iX~~~m"E2t!¥fitMfJLtnJttJL,~~1TJLtJL,if1:7"t1TJLfJL,1~JL±JlYEfJL,~~fXXJfph1JrJfJL,~JtfJL,!!fDlli&:lliffl,~tJJfJL,1~i!fr~~~~~~Fi".kP,WH~~~".kP,~JtiJl~lifJL,:f5JPTtE±if!.ITOJ:J~Jtl~~o4.1.21~YMi~~~tJ~~t&1tVJ@Iz~~fili:rmJ:Fi.1*~x~*,*mifilii1~m~~~Wtt~11r~NiiJt&rr.ribB"~1:-rfn"11:~~t~t~13"1i~uii*®:iiE~m~~~~~mT~iX~ili~~B"Jffi*tt~m~o4.1.31~fnii~i"ft~~~ElWH~t9:~fili:~~i£1tH$oc7rJ1~17t-T7~8""1itH$rBJr=J=t,r!froc1Ltl18°C,___,2s°C,tEJxtr~ocliP14o%,___,6o%o4.2mt~fll4.2.1ifitfilfJL8"~1C~b1Z~itTJU~Jl!.5E:1b1Z~ii~~~~-~~~~~~fil-~;2iJiEfil-T~~JXt~MIf-1FJXt8""11JrPJm~ifitfilw1~~:1irPJIf§&;3it~f§b1I~~if~i:f!Lrfitfil~1mt:J)"r8""1fiLJi,~~~tt!"ii:b1IW~;4mt~~~~F=~~*~~~~n~~~*~~~~D;5-~~~*~1C~b1I~~~~~~~~&,~*~~~m*o4.2.2i1iEfilfJL89ifffl-iiElii:IEfrb1Z~itTJUt,W.5E:1mm~MB~Mm~#~~M~~ffl~fil~~;2t9:~~~~~m¥&1C~~~~JiMI*~~,~g~~nm-ar~tJJi10;•9• 31~j:&*iiocl35tEfJ__1JitfilW1~rmi~rmioc-.±~JXtftpJXt~J5tR~fil~n~N~~~I~~~mN~~~;4~*~z~ii1~*-__41l!fti~~o,~oom+~x8®;s-1~~>~~1im+~x~zY1;6rQ]yfiENtJL!?£*4~If~it9tJ1t1-J~u9tifiEfilst"i9:*JM~rQ])!&ftpJXl,ifiEM1RffmWit~Y+,ifiEfilrBJpgJtf"FAJJ1./Gmn~118¥1JJ:AiJiEM~,,tJtTfl?Jt~:H6~if+if1JJr-r9K;7-~~1Rttti~l3®:ititt~,1fiEfil~tti9:~it:t_tat,ifiEfiltJL**ilimti~A~~-~*mfi*__+~,mm~r7t1~t~1m1J1:.~*frtUlrQ]tL__ri~,fl~9-tB~~oc,1ffW~~Jt£ftit1Jffil&ill7"J+5%o4.3tJ]Jt*Jl4.3.ItJJJttJL6"J1C~J~1:1ilrJ"!J~J[;E:1~f~$~~/GFn1~NR~~~it*tJJJt~N~,$L~~~AM*~~~~*~N*~$#J1tfi~~~m~;2tJL!fJOC-¥6"1Im~i!Jif!.r1LiJfi]~frFn1~lK+ooI~o4.3.2·fJJJttJL8""1ifnJiiRii~1-TJE.1":fitr91J~l5E:1~~~~m~~~tt~,@~~~*~~~fr~~~k*Jr./=tf~jt~5E,*sl~~"Mrf1L7j(-1fl-~1"=±fil~un~;2J!#j;J1f~r=f=1r1LiE:PffliJ~J1J1~J!$t1-=t-,JM!k.tHfIBRfl.1Jffa:r~~;3ffl~FIHif6"1±itw~ir11J:J¥lmm8""1w*t~~!:t-~wat,tJJJtVLm~~ttt11JH__~~~1-&iGJ~-rnJt1m~r;4fr1¥iLEtnJt&tit~t~__~tt"19.J~r~r_mA"Jmrt£r,fr3o1-tr71~xJ&1~m~f]L1mu±itJttJJo,mT-1$__~*__~11__xi~~tt,±itHLJ~~ftif1fff6&$L~+0.5mmo4.4.1~~tJILtJL8""1g(?&mt"fitr}lj~J[JE:1~fF~~3Cf2f""J~it81.JifJ:*illWe*Jt·Iaffl~1?Yt~;•10• 2x1-T-~~$3lft~/GrnJ*J3i~Q~JJir~~8"~j:~J=1tTtLB"JN*"fJ5L~~~A~mM~~~*~~~~$#*fi~~*~~o4.4.21-:~tTtLVLEt~i~iilkii~ffill1:4~~JUJ;,m}E:1mmmmm~#*~~~J=l~~~~;2riff~__tms"J~~Jtill7tn!i.itif~:rLEJ:m:B1.&~~PJim+~,wm!Rw¥J-jt#J1£m~J:,JRwm1¥-~,m~m~*118E;3mNN~*!ff!:1~strHJ"xYm~·¥PJi*-1s~1:ttstrBJ"trILJ!oc~3:~_T.Z~~;419:~~1izBtXYVL~-=fm1¥-f,gf~Z#J,R~tf(1t.*4,97:.~±JI1Lmti;2w:*1Ji5(£_~~ff1tJ[t~,ir:r.1Nii=±ttJEJ_~,r~JI14FkfJ,±JIJEstrBJ;3~1-Ti9:*St,J1L~~)IW[flj~nX1:~JlEf{J±;!l1L;4iE:W:~~Fl_txtB±l1L1:~Jti2Efr~*~1f"f1LJGtm1L:EJl~;5±J{JERxrj-n}i)=f*"CCDt111~*"~hEl"~4t$14iltfil!~Jf-Nft;2EEf!L~-¥J:Jt8~~~rxxJfPNIJVLrJf1iiffl1JRnJiJt*8""1~~n)ifJkval~1£fllJ~J}c~00J:;3N~12~fr5,J1LtiiJilUfpNIJIf"Fi=18"1f-00J3t,iifij~:iti!J~*o4.7.2~f"fXXJfpN1Jmff1iftiliJtEciJ~1-Tmlrt"frTjrJt~iE:1N~§f~ii:ctfil,ill~~fXXJJt&?&AfXXJ#&fli*J,ft:T~ffi~~~,*~fXXJJt&~~~lJJi~;2ill110A#1U¥4Jt5cJiX:fpNU8"1£J!l_I!:~~N~;3rJf1;m:ctn)iJt*n}i*1:WtJt:uXAIh!J:.JtiUfp,ttJIJ_T.f"FEl"00J:,m~*~m~m:±WtJt~~m~,!Jfl~fiN~~~~WtJ=lJ:~~~*8"1fpNIJ;41£~iJEfP,ffilJ_Tz>~~19:Jt%.f_ls~·,mm§~:Yt~~~H>lf]}:lffp,ttJIJJG~8""1±WtJt,fXXJfpmJ::I:,fP,ttJIJ00lf3J1LJG~,Jt1~rJf1*~,illxwr~,~o,fl5fil,1:.~J1!Jflx1~~;5~TPoJ1LiJilUiifXXJfn~jkImwJk~x~"~willM~Qsi!Jfl]ii~>R,~Yt.ftiq:iwe&!Jfl7"1+15µmo4.8~J=tfll4.s.1~JlfJL8"1$2?&illr-1=~TjrJtJt!.1E:1~&~*~~B"J~~mz~~~*~~~~;2J:fl~~T~~mz~~]E~ffi~~~,Jt~~~~A~*R8"1JE1iLml!XT*4tf:iirt•;•13• 3zvittR.m~~J"rm"m,~~1t~bsitI~JJ~A~1iLmr=rflSiJ:rt-t*~E811Lftir~;4~J=lW~tt~rfl~~ttB"l&~&~ru~~m~~~~;¥4PJkfil.J1l9if!J#J~~J=1:ii:tt~5imt1M~¥1Jxt11li1gJ:IJjttf&J:,YtrBJ~~JtJ1I:::ft~ft,~mM,/G~tJ1,/Gf$11l;5~J=1}E{lliL1rfrll91"*§mE8f,W.ff9=t,L}iffHli,HJ1L001iYff6~~J=1~wa~*M~ii:1#JmmtI~~~m~~JR$~JitV!f1Jf~r*t~AJ£t-t~,J3J~Jm/G@::@J:&~~J1~1J1,~11lo4.s.2~JtmB"liftfliiRtJ~1-=rmt4irr9u~~JE=tJ1L#Jifftlfl=:5G~{lliL8"~~~Jtfl(Jllfffff,IE&,1f1iL$f~>}(~JJx=r-t-ti!J:_;2ittA~J=lfJLJ::iifFW1ii,~1-T~ffFo~JtfJLf)sLIfl=:iE?ft;3@:~~ir~B"J~Jt~~,~~~~JlJE@~~~R~J=l~1tmoc;4r;g_~rt-Wft~WrIA&,~~atrBJ,t-tft-15-,~J1~~,~~nJ?.Mtlk=frJt_IZ:~~,~1-TgZ9J~J=lfjff;s-Wfkb1I3JL~i61-T,7C~Z9J,tP-:ittRJ~tll:~*f!t:i!,~Et!VL~~@:iE#;6l$J=1~mmtI~Jiwtf1J±-tf!#Jxt-M-11LE8j::_WtJ1tM~ilJ~J=1i=1J:,1:.~J=1m/Gtf~,/fmM,/G~191,_§_frf$~:ctfjr-pmi*iiEtfioc:::f11:~J=1nfil11li~r&cmJ:r~zroJ1rm"m,r.ffiioc-Wltmitrt,m19!~~Jt/G~t_m,JtJ1L~iiE*§~~~~zl"8JtI~*tiJ!$~;s~J?.Jm:ii*irti~t-t~!£:ffm~1-=r§I~a,~~J1Lti~tffe:$$PJiffl1£E11fil_tH1*iiEf~Mt0~1Rt:::f~%,gjtJ=17t~Fn,~1RtJ=1JitLr*J#t~-tJ11£*1*1#5G~;9§Ii))J~JtFn:itt1iJiiLtJJJ=1,ffl3DYt¥19!tlit1Sl¥9!tlI~tiJl~~~~m~~J1Ifr~~~J=l~~~~~~r*Jo•14• 4.9.1~Dffi~ffitJLB"J$:9&Jl1Z~itTjJj~Jl!.1£:11<~at,ffirf*fOarr~B"1~Z)}]mi~J~1¥-11:;2r1tffiffiI$_We1=f1EfJffi~J?~JI;3arrP"1~"H11}(;3i9:*t~f-t!Ul!~J1@:1j-=f4Da5.2.2&!~~M~~fJLB"J1JJiilkii~1-TJ_ili:7:-t{tTJIJtJ[}:£:11~~l~~t£t&f1l1~r5t,Jtlli:friJt-=fJJ5~~¥Uf!Lr*JB"~~Jlfl_t;•18• 2W~JfilEt!J§,r1l~~·~*itf"Ftt1lf~~If"FlE1ft;3m~~~~~$#~~JE~,#~~~~~$#*fi&~~iE;4m!Ji:~-JiJ~Mm*J,mxttJL"iEB"ggig~~Et!mi~1~1J-rIMO;5m~i~UW~~~f~tJ~N~~,Jl-~}Ja~~~~ITT~~mJIG~t"lm~~;6JSZ91Vlf10C*,ft-=f*,1~m*at,~fr~1J5.f1I.1E?ft,u*Fr,4*~mI1"4~Jl*,A".2~Ji.~oc-ar:tt~,mJ£strBJr*J~~u~~5Em,*~-!l1~B"1ffi.tJmmzt£t1Jt£2xio~PaVJr,t,&~&J!l~NmPT:ItJU4xio-0Pa;7N*lE?ftgfrat"~M1l8"Jifli~NfffJ~*/F1~~:i13%;8J1I.~AI~~~#~~*~-~~;9J1I.tl(~~!Ei9:ii~Mfil¥Bd~MrfJ$,ifftXM~Ff;10Mfr~iJEi!ijM~-ffer.:2N39:*iE1ft®~ITT"f~&r~fr~M~Ff;11tEffL~W§Izmf~*¥tJiat~*1~*fJLtJJX1f,JfM~lEfJLfJiX-JU~·1"~~~~&i&.*¥tiEt~11Lft,~IE5GmFo,m:Itt1-T./GrBJWI-8"~¥tli1~·3!1~Um,f~J!~12J1i.§1!JVT:ff~~;12~Mfirf§Z91.5Cnx:fr5*HJB~Jm¥tli,1fil~ii~~~En~~±41~tt&Jtttr}Jbi~Jr:~*0s.3.1Jt:2~~fl~tfll8"J!Ji:~ill1:4~r9rJM!.IE:1w~8"~£*=Btt~*at,J1Lif*f1"j:itt~a~fmu1<~1m~~tm~ft;2t£1ffl~:i1fjrpLt~~t~8"JN*M1JO~~M~mJ=J-;3~~~~~W#:tt!fi:~~m:Ittffm~~~~~~;4m~M~:2~-~~H~~~*~m~;•19• 5~*t4(:tif!~JiiJ1Z1Jr4fLs.3.2~~~!stf!iJmm8"1iJffJiJ.l?dJ~1i$1_r4itT9tJ~~5E:1m~r_m~~*~~t~o~Nimf=(.,~ilfJa~w~~s"Jm?t~ttt211l~~i9:*tl1ARX1f~*,7t-T*,1f£rli!*~~N~~iE1ff,ill~¥Y1H&~Ltf{~JAijI=(.$~NTIW,g~>1lto5.4.2ft~~If§r.JEffl*mB~jJ*JLi.&·LA:~1iJJiirftT3}1j#[JE:IrJit~i!f~~,tli:fH~~~~~o2Ia~Ji~Jfe.st,ili:fi~x~fJ_irtkT91J1;J[5E:1)p*-~"fl~41fj>q_:JC.ff~?;2)-~~~~2riPT1£~w.J£atr(1Jpg~$tlJt~A£m,*m::if2s"JJ-fJJ1mm:~iM1£2x1oPal:JT,tllr)~~:2B"JJ+..fJmPTJt¥1J8X10:;Pa;3)mfil*Ji.~*8~titJ·~s~-!"BJo3J!.~nomrJJtms~iX*JiJ.f~:2~m~~~£ft!04t&m·iJl~~*W1iXH_~~igw:t=cn,x·~-~~u:tfl~f*rm!d~,Jt·mrtJ111pg:imA~1?~f*:ittfrL!XtJ051~t?;EfH8~f$Jtf1I_1¥ff)t,iJt-=ffr5J\I?&Aftif~~rq8~~J=lFJpq,Hr§L~~Jtf.tiJtiJ~~IJ.T.~1ft~~o6iXIEtEfHili!ttt,iJEf~Ht!"al,iJEfH_T_Z~1*lt{9UlOm~ii,rJE•21• fR&JJ,miE1Fh~iE?ts"~,~{JlT:iiAT_6~1*07~B~m~~illfi~~~,m~M~~TZ~~~~~~1*~.-z;_ElY--P·fJILJI!osiJEfHt£rf:7tnx:Fri11RtHBVJ:fHt-tJl,fflJ"t~~~J!11~UiifSl1~1Jii~~&:a~JJocill"sJtt,m1tJ1..~~~~iifrto~1*tfffigflrrml_,@w>R,~l~t)J~Jttffir-rir19:~1~f1F~>1R;6®Ti=E!.1*1??£~!DI~fr1E#o5.5.2$JE?*Lt1.~t&*~8~iJ~Jtit&-ii~frMr-t#T9tJ1!1£:1~Il~*~fJ"t~1jJR..-~h1fy!fJ;¥4»..&,~8"-J_T.~;21~nJU~¥JtJf-f~ocr~z1J~ro.osmm;3~+ri&t~,19:1i~~ffir-nJE1*iNiJJJti~..~JRiJ17G:~:2P,&!)ftrfJtm..nJE~1~JRrJ1M~..Tffittt__tr~iJ1rJ1~~..:ho~~14A:2u,&UtJ;bM~8ZiE1ft,i~J&ilffiifIJnt~M;14fDL~#n)i~tfflAYtt1JJ&HRrf-,Ji:#f·Yt~1JI&li!l.Ai&4&gw1t~rfl:tf§J*J,Jt·m19:if.Mttx:K~J-ffJ..¥~J&RJrBJ..»JE1~~:11..-nJEr~atrHJ?FiJtA!fli1!lioc;5mft]}IJw5Eift~~rMioc7"J6oQc..12oQcfo18oQc,1#iii!oc~J£Fn,JlltE1JDfA~~00tBt,ftit1ffia&:m7"1+1.s%;•22• 6rlslft])1Jffl~z;JJt~ittO~~t~51:::i1tfr~Ji?~tm1t,;ft{tf!~ttrJsLf~:t#~~,~1"£JlM~i*~Fi5R]ft-J_lIJ1~¥1J1AtiF1__ttfti;{j;1rJLfflglw~~"JJt1x~~~ii£J1s"JJ:~T,1I.,1i-,~·Ji1",8s":JYet1JJ&~JJ!,Jt~:tuJ1!"HJWliftir1ffia&illn+s%os.6HI7Cflls.6.1SiYetiL8"13"2#&fjiz1-4ftT3JUt~5E:I-~~tM~Btr;q_*fflX$~Rit~m-¥~f$~,~1-¥J.1i1JLZZ91;2N*3"2~~~~~¥~ffl*~W,~~~m~M&~~~~1"~~~~~N~maJxm~J1~*~,frmm*+&*fi~iftW1if(J·iA;3~jeje~Jjtflljejejmt~"~Yi~~J.9Jjpfl,r«~~jp~~;4~xx~~~N~m~~~~m~~~;5-j)l*ill~~c-=~Mil!tLl=~i}fi]ffi~~~"3"(~Fk~2~Btm)tJ!A=~uiI~~~"Wt1(A=~i)ii][-k~~"~mN1*Aw1i0s.16.2fJiJCtJL8~iJtiliiRLi~frmZ-{f1tT3JrJjJl!.IE:1J-Jiii1if)fYe~1Jft&,BJ:~~Jr~ff[91YetrJJ&8"J1=tfJ1ttrJ¥J1ElxJrlYz-~JJ1~,1tttt~AAm~r~:xoo¥~g~-OKff",Jt·bil!i.~fJt&E;.r=ft;21llJ"t*15-JErlsl#:ffYt~IRift1J~?fl11!fr1~11JtA:t1J1iffjiA;13_®.~11fltt:Jt~B"~r.u:JXt*mm~rmi*18~ftrJxt*~1EIf§iit~;4mt~AH~%Lf~~,1m~&-J"l:~~-=~#~~,1r:r1Jtm~rrr7J<.ffnDsiJ.J0.13MPa,___,O.35MPa;si!i~ag~~~g~,~Yi~A~~g@,~nig@~"~YiimialJi.~~JIftf!;6~~~~~~~~~~M~~&~~~~*~~~M~/GJlZ~¥ft;1m~1!fi)[4&8"1tm/=cxFf{if?,~Q~t?,w~-~d"trt~rJJ~m£~.IE";t,iJkJtf=1n,&fflBJ8"~~~:2ffjJffiDsLff_:-y35kPaos.1.2-"~~fts"JiJ~J~i»..tiili+r1}1.iritT91J~~J:E=1m_itJirtMl1P.~JH~1~r;g_~ili,·t:~-t=-7K~m;2JftJLJni5l~Y+T.-ztW1*8~rfi!Ji"tit1*th!grrJLfr10QC,..__,130QC!"BJOJiJtiJ"rN.iJfiJTJ~fOfu*l111f~}1".}J"JtiJrrJ1I1[tftlJ1Lfr()~14.7x110PalfiJ;3J!lw5Eff~:2nJifR1iJE~iioc,,w_fJstrBJ,1~t7tstri;u,JiPt5tstM~&~~~Ji,fr@*AIZw~~~~~M~~BTZ&~;4m~B~~~~Jt~AJt~,~~WJt~~AJt~~m~smjThti~ilirr8~f~F¥Jf:4t-mm*3=:~1iwoo_t.8~"iaz:JJ,,t:tcill,¥~JCriJ~NJE8~~~tilT.!:tb·¥~itt1ig~)Jrit.~/1~tJttift;6*fiH~,~~~~~Tff~~~¥Jt~@~~~~~,IZ~*€!JsL~~*B~~~~~~~m~;•24• 1m~¥~~*fi*J1~~Jl~~m¥~t£Jl~~*J1~-Ji!i.h;sN*~frstmx1JRZ)}Jf11u*f5;9i9:*H~"1~1JtFnWZUEfriJt-T~J_I"i!iloct£1Mm~1rtE60°C,____,180°C"t£r1fil~JJtillJg+2°C;1o~*FnrJsI.x1¥J1it!frE3f]L,~1"¥J=t~oom<~r5t+1~#ii~~-Ti*,mx1~*-1l,~?Jl~u~x:iJ~;I£E;Jri.~itIf~B"~£J=trJsI.HJ~,~5}WZ~if,illx§~J&,JC~*Uo5.8.I5.@~-=ftut!ilfJLB~1(?£illirit~~IJ~~JE:1ill~MOO~~~~~~N*~~~Jl~;2rJsi.~1J~H9:4§.faPftJr~~>}(,12?J(~f.19:ti~JXt*~JEuX:~~ftf:JX-t*3iJt1},fl!,Et!Wi~illWCit4Zffl:2~ff!!::.,1~ltl!~xJ1lUT3;4~1Jt!REE!t&rN_1filiLff:~1NIlt~!p7K*~,;j(ffibi11o.2MPa,____,O.6MPa,1kiEU~1%t#if16°C,____,28°C,7j(~if.~ill1Jr3MD;5ill$:#&TZffl~CF1,SF(),C1FtiJo~~l=.i*~if!,~rmi)lfl"Wc1illfiliE~~m~1*,rJJ*m-?&~1*t1tosoow,Ji:JH~1f~11tJL~i)J~WCr}Jim;1~~M~~tt~~~~~~~*-~~os.s.2&IE~-r~,Jt!RVLB""111tna:Elii~flmr~it~jrJ:fej[J£=Iillii*ME~Ml>t§fPJ~Jjt~~51Ifl1l:Jm~(J"~¥Jl,_§J~E~-ii]1-JEt9ft[f~$1D;2ill~~~~~~**~*~~~~*m*ffi,*ffiM~~PTJA11R;4m*Wi9:*Wf}EJ}j$Wc1It.£tJLEt!~06.4.2*~~?s{J1J~JiiR.rJ~11·mwitT-VIJtw.J£=1iai#J!{2:*,~frstufFt.,~i#Jmx.ff,~,JfQ1*J!l.~ocQTfr*,w.5EstrHJpg~¥U*~5Em;214"?KtJL~1*pg$1ftAM~7j(,t~:il11i~7j(tJLi=g1JJjtJtla1#1Jj(<~*~,7j(ffifE.~JEN*19!ffl~*;3fr¥.rlfil¥1JiiJ®JW!JJtrElJ·iZf*~~r!f!J3t-~IE"1~?rli!millfr:ho1f-~,110rA5GnX:Fnm*~"JiE:ho~~t&s"J111"tifil1E,~_tmtQrlfil1A1~1~1Jiir.N!It011~J=:J-~1£mtt$5t,ftit1Jff6&m7"1+sc;4-l&l5Eii~r!f!oc,norA5GJJY:gr91uft~~IFmm~~:it¥1JN1£m;sJaZ#JtQ#JU*~Jt~x14,Jt·m~~~w&JJ,rlfilocliH~~,Jt:2oc":ho1At={!ilrE":xm~®.~~_tB"J~B"JJ!i[~l~FfHt"rlsL~~iE~~~1-T~tifli.T.!:ill~06.s.1111~mittJLsJ(iJJ111=tffJtii~!h"jj:_,~1*1;BtIf"F·~1*8"~W!~illi-til~>J<;4D3Zi-9:11:1~y)tr)J$,1~y)tB"trBJ,1~y)tJ@U¥;sm~m~~~If"F1=t1*~~~*fim~,w*m~£*fi1~r5t~~*~5E,mnwJEJt>R06.s.1mt~,ti~HtfJLB"~$:~illr4ilr91Jtik=1N*~tQteflill{ijfi~:Jtl~;2~~lkffiD3Z1=t~~~~~~OD3ZB~~;3D3Z~~~~~tI~tffL~~~~IJffl1ffi,tfi1~~,mJkst*~YEo6.s.2mt~"ti~iivur~11~HiLZ.ii~rrm1-B=i1r1u*J[J£=1D3Z~~~~~pg~JE~~~~~fi~~~~~,~~1±JEA~*~ffiiZ110JJsi1iifl~1¥!1Jii;2ill1*~~*4B"~Wc1t~>Rm:bn~-~s"Jm-"~n1J;3mNit~r~Ffn,-~r~J-f11,w*4ffiJJ,"*1tfffJ,1±-¥M~frfOR~~1-=rt~J:ri&l*~"1Ltm1@tf1J~~~fi:Ufi;4i&l:*~1-=rn%":J=8"m1J"r6odB;smm+ftr~im1JiiitFftB"1~~J11~oclor~mJJJ1t,~~J11mJj[ftilf1tffa&m7"1+0.5mm,~m»JJjtJJ1LtE0.02mm~O.5mmZfBJo6.9.11¥-1-TgjfmtJt~~~mi-tilr91J*,N.5E=1~~~~m~~~illm~~~~n~~~,w~m~~~2$113(19:*~~~8"J~*i&l~ffiill~~~00~*~*~1=t•32• 3f:k;3BRt=cftilliA-¥·~i§Htrmill+-1·±:r~9tJJR,Jrm-JJtjf_1tns0lEwJJ~t=cttJ:-JJ!iillim;4-L&*-f-~r~fl3ZWit~~,*itffls01t~JtmJI:M-x1UZ1-9L-¥~ill*ffl1tfflWitllIWito6.9.2-Sf11-giti~LfJL130iJti]ii1Zii:IE11·mr{fftT!irJ~J[JE:1r;_v.J::.-H--¥~r§,-=p**mB"~~r§tiFnilliEtL~1:tr*~1=c~~r-1-;t~,m{~-¥~*§tll5c~f"§~f:(Wj~LU~1/==c1i1?lfJt;2J~Vl~ii"Wf$1fb1J!iAJi"2tttt§FnAtlf~~*J-tt§Witfl;3illlai}J~~*xti~~~-t~§:ffA-R"2:,-ffei:2:*:IEfrHtU*~"~iJJmffit~>J(,~f*A-~ocmt£rJl!.5EatrSJP"1~¥1J~J[5Em;4rJI.w1ltA~~t§ififrJ5t"1tt~~-HJru-1,:fr1ftJA~2tk1J5Tx"tf$~ill1t~~~st,rN.xYl~ffir7"1?!frJi-~-~~~~$JJsilJN_;Elli;sitilJ~~~u-Jl"SJFn-I&~m~5)1J::.1~11101A"R?t~Y.lfil,]I_?it§pg?lfilJJt1li:T60°CHt)A=f~tfi~_ffil~:s~~ffirUJ8~1mun*LUf$rfb1i!i.ft-¥~*§r*11=#1W8"112{JE-X;6m~1Mgitmf~J¥:Jr-&YIit~~~;x.,*JJt__j[oc__Milllft!~__mttffrt"git"J:!fJiJit"gi"Weg¥fitIPMtlt~MJ(-r&]ff~§$!.80~11*tm~Jt·l"Mc*:2~ffA;2{4-!p7j(l&JJD~tq.f;ffrii1r~~~;3-19:*-¥~f"§11Z*~Mf:!~+,WitmB"~mJ:tm5e~t-:JG~tM,--¥~r~I*ffl1tfflWi1·~w~H0•33• 6.1o.21t!Hmmm8"JiJtrJ-tiLZ.-ii~frmr4itTyIJ*~J£=1JfilE:t!Fomtr3fw:~~~n,192-f·~*Eit-ux~~f§ji_~~~i*=t?fiF:tt;2rilJaRJJ~?2*,~1-TBtnJk;=n,1i$JrlsLZ4it~>R,1R1*~:2Itmtr:tiJ:EatrHJP"l~¥Uti1Em;3rl5lf~ft3tiftiJ~4:.1*~_Jf}(1*,-jX1£*~JETft:ffifl,)}[ifiil~ffnti*E:t!~,-IXJ£mt~fffJ;4~~tt~~~~ffi~~~m~~®~&~~*Tmm~1E~t:li:tB."jfm~*mttR)J1t-B"Jff,&.fJL~i9Jft:~~7t~IE;~"1Jfff~Jsm~m~~~ffi*m~~ffi~~TZ~*~~;6JJ1Zft(I.Z:~>R~LE~ffl1~ffljJ;2it#Ili1liit,jf-~ft,iJfiJ~Wit~l*laltN~ffirJIB"J~~~~#~*2~*J::_,mEfHiA-&*~=tJ~ik;$~!If,~~fti"~~~~zxi*;s-&4&-¥~*§m!&?it~!If,witffls"JmJ1ril5GMxtV.U=tM,-¥~"~*ffl~fflWit~Wit;6-&4&!Jtr12~i~J1tJ?JJ1?~o•34• 6.11.2i~71tWf}LB~iJ~JiiR.ii~frJill1:4B-T91jtJ[5E:1~~~T#W~~~~~m~T~,fr~~~m~~M~~r?1i111una~i~7"t~JJ111u~m;2m-w:itt:imuilfr~,1mt=cccf*rJiEht,iftfJ11-<4-tp1mlf7J-----2s°C,t§xt1~Jln1140%,____,60%o7.2.11Stt-1g11Jti*~1E8~~#&!1LfB=iTT91Jt~5E:1·I&*JJilQt~~1:J~t!ll"ti~fi,1~f~q1,X::ff~~_;~i91,Et!.MI+:m8"1JtffilNit;2m~*~~f"tr-~$JL~~:ffnfJm1rn,t~~ftY:Rstt~:JE;319:*!JtrPT311(Jill.,tt±tf!Et~Jll:JG@Jcr4n;4~*=!l:~mm~~m~~:JG~ff~PT~$#~fi~ffitts·l&*~¥l8~~~m~litT9tJt~~:1!fil001*~}J~91$1J-=f1oHzB"tf*~i/fm,mi12µm,1*i)J~JPf•37• fr10Hz~50Hz2J8]Ai·-JmitBt/GJ~~i10.4g(g7"JltfJ)JDJ!Ji);219:*~~Ffmbi1~rtsrlfilntffmo7.4.23D)"t~i~!IJii[{)l8{]i)li]i)hZii~{i}~1-{f-i"f~3f1JtJt~:1bift~fBxJi!.~~m801{¥l}Jti]14:"~~)JatJii.JltVl"mx!ffn!U];2bi*M~*tt*~*~~~Am~m~M~m~ft~R,±Jct~xt)"t*1~1jitl19...B~*~1Ei~UJE-~R~utff~~1~"~-lL*rJEt~1~Xt~;31~1Jm_7"t~!fQi"ft1trj•fili*-00lf3lk±~t!,[~~§t"j~lj:iti~lEJlsj_1{f~i&*tt*t~t~!f*;42il8"3~~@1141;T9Ut!5E:IJlsLimiiiJ~l~ri:ttfJ.M!P~~ti~tViJi¥lf*J1F-1,2~JtiS"~frbif-m,ccom1~00ff~hI¥~Mrr07.5.2I~~J)"t~tf9:~f~8~iJ~JiiEZ.t:i~1iw1":4~T3JUt!JE:Ibi~%-BfphfJIJ-f£f00%8"J1:~Jt~~~~£If&t-:~ft-JJ!l.¥1Ji3l*~Jtf=1J:,ffil:2n,&rm$~,Jt·bi*1tIf§JlsL8~fl:rfb!!IJf3-X1-4t~JJJ¥1JMc_JfB""li=t~J~*~JI!.;21JsI.*1t~tm~JJI!tx1-4~?&frJj~pwej[_B"".fIt!.ij~*£Jtm;3-=?iJJ13mj:WtJt$:£t&,Jrbiitt1-=rt0mB"~~~i&J£;419:N.rehitooJ~fo~rffitill:1~1J~tt,~q--1·13mfiJ=f*1-=rooJB§zijj~*,19:*biM~~$l1tnffl±1!!t&1tH1_ff-:fltrrHJF-1ittB">J?Jr~[!I%{fJ(~8o7.6.1i7JXJ"ti9!1JJ!1-f>lB">Jg(#&JJsi.r~~T~IJtJQ.5E:1y~lj~1Sl8~*JJI!EkrmJJsi.jf~ftT-~~"~~*rmJf~i:J!ID•38• 2WI~~iJ~]11"±-ill.ff!D~~ti,*1f7cJJEiffWfltflffiliJ!iJ~Jk-f-o1.6.2i»t:Yt?m11JJJ1>lB"~iNtl-~itElii~frJJitff·itr911~J[IE=ir~ff~mxYl~?ff!1Jit11izjj$f!J,~5JJAtfilJ119!"mx*o~J;2m~wN~tt*~*~~~A~~mtt~~m~~m#itffi~li;3illk:Jtxlf~~T7-"rr.nJEiH1~fflrtrillJ@i"m,£LDif=I~R~~~;41YWiiffi~Di~ff.tt*1~t~~)to1.1.ix~t~xt~t~1:Xslattti:tH,u-trr-J&*$MM~sJi~1N1J,itt~miJtiJ~r~uii.~!tt,-J&~!Jif=I~~ilJ,11}_~¥~Bffr~11~sJ(;stgt~lf11j[fn~rP1m1~it~).K;6tgll!"WHUmi!M%f~;7~ill51UJtii~N.~~jtimZ-4%~:>.K;8Et!~~,Et!~tJ!.f~,~-"%M~"f%i9:tr!!I~~>R,Et!~g{S~,!ftl~~~m~~tt*x~~~fioo*~m«~mr:t!~IW~I~~4~JJ!.mJ)GB503038"FffxtJ!.JE;91~±filillZ.IE1iiflr.TJ~o8.3~I~l&8.3.Ir91§1!A-~1ftill~11~fti9:*fftJ;-t-lf".1ftJffil_T-~1ft,i9:it1fl1ft,_Tt£JJifJlll-&i1iLI1X:!J6~Eli•jr~B"J·1t*~11~~~~11"Jt·m~1E1IfilT%rPJ,7-fs:tJ!.frLN.i9:*tt*X148"J~)j(Jltfrff!lT.~~o8.3.21~~11~N*~1fltJL·li~fr,fl~1fltJLt£tm~4~i1t~J§,tJr.TJ*A~11~xIf*tJt:rJ!.*m,rng13JxIf*ii"Jg11*~~~11~x1lftiiJI~~11~~~~1lft~ru~o1±~Mffi~I~~~m,1fmillfillft~®~o8.3.31±!}A~1Jr11Jii,¥9!Uii,rJJ~~ii~AAfSJ~~tH*8"1i9:*~iifOJmw~~~1fl&~~m~,~~~1±1fl&m~~~~~Mos.3.41;}X~11~N*1fltJLN.1lft~x~4~m±Jl~1fltJ1cllft~x)~4~1~~,pg~lkf~J::J_\Ir--tit7-fs:tJ!.1rL~A.o.480tJ!.JEo8.3.51Wig119£i3l>i1-~~.T.ti~~I~~Eltf~JJ1Z1£3t3t1~~4~Bt8"~Yr~Wtt-tjr,:Ifilll1~5t~~u1ri*4=1N*iJHi"=3ii~fric~;2i9:*-&itJLCifj(~)~~1~~;3fl&T.l!I1kNit5££x14;•42• 4TfimiJi-$t~iLflt!ic3:Ro8.3.6~W~~Jimlx~-T.fiJW:itittfriffit,Jf)DztR:1i±i~l&~fiitoi~~ll~i9:*3(:1~~4~ht1l!Z_TlJ£l4~J~!f:p=~CXtt)~!ZT~~1~15-,~J"fI.~t~5::mr-tit*tIrl1*-A.o.s89tJE!E0*110IJ£Li&f~~rfLif~_T_~4~1~15-J:~*08.4.I-~N~~#T.fi~.T-4NZ4~/Gr4itJW:j±~)j(st"[JIEB3C#&IfiMP:_T1fL11zi1!ffJg_TTIXjg1~08.4.2~19:1§-T.L:t~t!f/Gr-tfrtt~~~~)j(Bt,{ttti"JfL11zJllX"J/G~f,~8"1mtJi!"OJ!"11lf13Ji~~,Jt!JixtBtill:1ttfJ8"1~~a**~4IEmt~110~m~,~w~~~~m?~fil~~~m~~m~M~~~ey~ttm?,rPJstmrn1ffl?~5ctz:ifrljmJ:i1rOJmMttc"~fi=&7ttrrtIZ15-08.4.3B:iS1~JG·{JJ/GfmW£J~ttimw3RB""1i9:1imiitf"OJ~,rmB~A1fL11zey*1m~~7idtiDl*IlRiltt-tt4~o8.4.4~jgTJf?i::iJf.JTtill:!Ji#IJ1E~J~if,~B"Ji9:*,ill~B"J3t11JJY§r!A.lfi11zo•43• ()#*A1~~Ji~~tz:t~Il:~*1(~Il~~45lic*ffl*A.o.11~~II?&~t:r_:~xT-!:-I&*JFm:f]l1fi2~a~rAJ~lkt~A~r-rit*A.0.1~Jl!./Eo*A.0.I~filB!~~tr~I~i§f~7fm~~i.C.~T~~ffjT_~5f·illI[~lr]·I);(_"!"-~riI*I•1}DJ:~~~-[-J~}Jlj/#JlJJi!r-rx."TL~r-T·~~I-zJC:::ll!l~~-lt"lf=J(JC.:ti*_x_ft!:--~t~"trri5c=t~4~~trMiM:&-~;E:rr~l~:tt4~~IJ11&£9J-ff:~iJill~ti:iJt:*Jrx~"rrr(JC,:~A~"~·Jf"j:El~illVLTfl-"TitJ!."f~#*r~~m?r!rt¥1-r¥~-~~t~mtf!.fiL1r!i~~"ff~4~fi01-tlt"rrf(Jl?Fi,g~n,-tmflt:,[)f1ftf:Wx-trt~·xM(0-";&M11.xfiiR~~,:JY1t;f~mt"!h&MJo]JMIB"~~1~1J:9J.=i!i9:J"P-{If:Htt~r"ft.f.~1:f&~$l"J:Ml!:I-ifi-{~)::1~ti.(~l"t):ft:b:.c~~¥:):1-:1<(~-~):ft~C~¥>:·if}]EIiff]l=l1f}]fl1F]=}EI•44• A.o.21Wj~Ji?&±Ft~T.ZN1il~.9&Tfimt_ht~4~ic~Et~~J"ff.Elt*J::m1:-tit~A.O.2tJr.}Ea*A.0.2V&m~~.tr~I~i~fi~~I~¥mtm~i&i2~1~f_rlZ:·LQ·~r-rmTf~4jf;J{t]f;:[*l~}ill:~~f!JU~~-"ij-&:{}1f~~~JI~~tl*hlti.I-"¥1-{ii.Jiff~1~-?_llliif~!n:A1A1Jt~<1f.&~·~I11ffw~45l:x~111!".r~t~1:Elift!Iif1-11/f0:1ttifJ.Eic>K~i9:!ft{1/~~45l:ic>R1~-i1IT*-f~{111.YJ.:2~~{1"dft"),)~ffi"k~i:f-i11Ji(J}!jJ[i!i·]),£Jij!5&1Zt;klf-fitEJ6~~jfr}fJit7~~xAf1f1.&"1(oJ8~~~"1($9tt±IQ.4ttntl!:T~{1/.¥ii.ft~J!i-*i"fj£r~iD·t;·~Jififrtt&IJ<.£il:~f]LI71kQ:Ep.1i!J£!.45l:tliif:J!hD--tz-~1".ti*ff~fffA:~nLI•45• A.0.311&g_H?&~~~x.T.-~19:~i~Jii~iJ:~fric~B"Jr*J~JJz.**Alili:t-tif*A.0.3t,mgo*A.o.3~m~~f=ttIzt9:~iJ!Jut~ut~~Tic*i&t~ID!~-,Zt*-i:x"jL*~77~iJfiliJr"(l.flLItiilifi·f&flii.ilifJ:~~-Ef!tJL·ki~f-]"·D~:k~x·i-i:lb:+iD-"·iiili1fJijf"flij{)l~"tQ:*rt:iry.ijffFW~·1fil1J·!ft1ri~{"ft1ifTIJ!t~ta~~~-f~IE:ff~iWJ~?t"="ii~h"111{5[.i:i~fiffflilfilff:i~Ht:1~{$Jjt:J"f~tr~1iJ§Ig».~JjJ3.2i)tiift-:1f;f§......................................................(59)3.3i&t:@-~~.•.•......•......••.•.......•.....•...••••...........•(60)3.4-t:Q*·"!:!:.~••.••••••••••••••••••••••.••••••••.••••••.•..••••••••.(60)3.5"nt5tw&...;r±j~p~:-J-"P.---=]l•~:::f"W-~,_,,__1--Y•••••••••••••••••••••••••••••••••••••••••••••(62)4~m~~~~Ez..~~¥~~~IZ~*~~,ifiiliiEz..iJ~1-T...................................................(64)4.1-f.NJ;Jr.j£......................................................(64)4.2tlf..filtJL.........................................................(64)4.3-t;JJ1-t!L·························································c65)4.41:::-1&1TtL;fJL••.••••••••••••••••••••••••••••••••••••••••••••••••c65)4.5iJlf(-Jt·t"TtLtJl...................................................c65>4.7f"~rxxJfp,ttJ1Jt!L···················································c66)4.9~~-ffi~ffitJl......"............................................(66)4.111~1ftli~~~~~~~1ft..........................................(67)4.12JJ~~~~...................................................(67)4.13iJ15(_-JtiJ1iJ~am··.···.·..·········································c67>-;t4f~-tt-H;:#:11"tf::.T--++-"J-i.&_~;f-J:~EEi":::P-R":::I-~,-/.-51~1m~1zx.rnba."Gt_xM3z:~,lJPJti""lXii"-~fr···············C68)s.1-MtJ.r.J:E······················································c68>s.2fittri~~·HJi~tJL················································c68>5.3~~~~fll~f!L················································c69>5.41t$~ffiilEfR*t1E·············································C69)•55• 5.5nJE1*-Elmfjj*tft················································c7o)5.6fliJ1ttJL.........................................................c7o)5.7_.$.Jjf=I.........................................................(70)5.8BZ_~~~~lj"c!fltJL················································(71)s.91t~mtJiHtmfttn················································c7i)6~1l?&it~_I!:i9:~$:?f<"ifo1Ji:i2Ziig1i·····················c72)6.1-f.Btt~JE......................................................(72)6.2ZJ:lt1iJ:ltJL···················································c72)6.3ZJ:l~ra~m...................................................c73)6.4~~1;ft•.....•........••.........•.............•......••...•.••.(73)6.s"JI~4:1.l!"frtJL···················································c73)6.6fi~~mm......................................................c73)6.8~if·~-f1*-~tJL...................................................(74)6.9.f1ifitmtJt...................................................c74)6.11~J1t1!f!tJL......................................................(74)+J-±6-"ITTrl"fl-&__~~7:~a:r}:::P·Tl.":::P-,-/.-~1~t~,~1iX._1:Tf3(~"lJPJIJ-lXlI-JefJ•0007I••"••••••••••••••••••••(75)7.1-f.Btt~;:£......................................................(75)7.21SH~H.i%d1E···················································c75)7.3Fi~tH~f~im~~dJt·············································c75)7.6~J1tjJJ]~fffSl...................................................(76)7.7xM~~l&1tt1Sl···················································c76)8_T_fj~Ll5l.·························································c77)8.1-Mt~JE······················································c77)8.2x:t~~iei···········..............·····........................c78)8.3Yf1_I~45l······················································C79)8.4~45l/G~#l8~~ft.............................................(79)•56• I1.0.111&g]_~tt*CMPT):J!1~Et!lfa.gJi~tt*8"1fij~o1:::J!:ft~WN~m~~£~k,ffl~OO~~fO~~IZre~~Et!-Tet!~E8~fiP1~~JI:fff4,~m:Et!~z~J=flkJ=f:ctJI:f4gJi9&~*,%nX:~Woc,~J!oc,~PI~"ti89.gtfl1*fJLtiJ8"~~¥&1~Et!-TgJi{489tt*oE8-T11&gJi9&ft~TEt!-T~li~tt*B"~trrtJ,IE.Irm~iUT~008"1t11-JcJCffo}A2otitgc.7o41-t;tdtfJ7f~fl,~00,B**1HffilXJ~00%fO!ti!~~B~¥M~~*~~m~~£~,w~oo~~~0~m~mTtX*i1EH€o20J:ttg29041-tq=iWJ,1~~li~tt*JifA~ITO~~rlfr~,~fflEt!-T~~fOrf1j"tifmit1f.fJLJf~€1-Jcit*ffli*r,ITTtt*,1iD.mili;tt~~8~"~~~0IZ19:*~1~~li9&fflljm(J{jm~tEI.JJ~$7t0h+~1L"AAIHJ"ftoono*7f~T1Jtig11~!k.m19:*tEI.~~tt*itJfJi.,nX:w18£1iJfmlJT~~~IZ13l~,Jt·xt~-l&l*rBJ81~mxtt~flJ~!Jr,.T.z¥1i~~"ti,.Yz:~Wc"ti"I.?&~~"ti:iltfri9:ii-"~f~TY::..ll.TZN1&~~xT.-z:m.-JN,3tif.T.Z~~_r~Ft-HTitt~F£orPJat*fflgJi~/If*iitt~l~rft1U·lit#&trrt,JN:ctxt¥»1uii#&FniE8"ti~~1~t~t]Z~itt~~~*~iIE1~g]_?£1:F~!!::.ti.T!:.-~*gll~Ht8{]If§~1r±1m1~t~it*~-1=5N0E8-T1~gJi?£rJi{4iM@tt*Zl~,X1Eijt7c,IZ:~~~~,Jtiff!Jmllift1"1ii.TzN*mti-T#I~m:Jm_T-~*,xt19:*B"~rt~,~~,~11WCN.".rzVF~~ffllj"-m·ii~t"i8"1w3j(t~*1j]IJfJNffl19:*QX:jt11f!.~m19:*,ifooJ*J7C$m~*JEmE8"tff1£~,1l~fJ!1~g_fi~g11f4·ft11Jmlkrft11JiiN~~?&,~i&8~*Jr.m1-t,~J.t1-t,t1J1t1-t,iiffl~1~rll?&-I&*ff:~mt11,5ll!1-tm*m~71-,~iurll*m~4*i5t*19!m-1iz,i-9:*1:.F-{il,N~f<~-1Jzf1f1ffe:W89f<#&tt*f1J~~ft11JJ£T2fs:~Jr.m,~~•57• ~M~~ill~m~~~~tt*~oo~~~&~~m~~*~~~~o1.0.21~~Jl~1Mmtt-*±~§t!~fil~t&1tu:i~L~Jl?&fi11t?J&"PT~"ti~1mu~,§lWbflfflt3l$s~~&:~t&±~§1!1f£rfi!~~r*U~J¥ijjt$&:¥if&fll~ijtij~$&:~if&0*~m~~~~m~~F~IZi&*~m~TZrl~~~mrJJf=i~B"~/GrPJ5t1JITT.I$7t,~P1f£m~~~rwWt~J!Jl~¥t&ifftJm_r_~-I&*"¥tfm~if&tu:@I!:19:·~"~Jl?kit~_T-Zi&*fll_I!:~1~U~ito•58• 3.1.1**~~J£Ir11i~~1Wxti~1f!fr)m81$1{:1fif1~~*lt~t~,AInit!A1fi/fl-*CIK)illr?::i1BfciJHEl"JJxtif*~,Jt=1filI/diH~-AD~fI!!tit!ifos,91£i9:1i*A-ml,rm-a7¥~~-rxttfiElJ)}JJitEt!-I&tm:B!Ji?&~r&~~,~~N4i~A~~~~*~~X~~N~*fi~~~~,#·rwfrJijfli±i~x1trmDEf:1tt±ill8"1-~>~03eI.3/f~5Rxtil!A1si·4ftrm~?&N~8"J1i:~A.91..t~*A.ff!lk~JlflABiftlI~~~X£,~1~tl.1151$1tJ]fliTt#iJ1I,t~Y*T.#1#iiEJ:_~,_fl>trlifi--e:rJ"-"tJl-"z...->J"-"rF~-/..91-.".JX/f"-/..In;x..§;,..::"E/..913i:.~fjUWIT~*tr.tr+±-*"-Wf~~"n-L.·--v-~,_,_..xr.mrm4-±.,;t±:T:frft,(:;J+-+-.::t:.1;h·T,1-t=rTm:""J~"p~".JX/I"-y.._1"-1°DZ/FlAYE}@,-=p-JJ,0i"t/11../fT-~1r":t,~Jr!_-•"AT.-."~T~o~®~/E~B~~~7"J~~~$rm~m~tt~~~~~fW1£T:ittfr1ilP:T"?JTV)~.Ll:l:J~~IE~:f~ii~"fjfilT.AblrJj_Ff~tAfr03.2t~~*m3.2.I**qf3fiJfiI3-fffifffffA918{]gnnX:,BEr"~if-Ti&lfk~JL£l~f"6JN1t,~-Tftffftr-~13".JDr¥:l!J..5t1ffJjtff,tfi:Lt.iEnffi8{]~JJR~9lo•59• 3.2.3*jkxtiSl*7f*§8"1217~lO$1riffl:8"1$J]flfF:liTq)j~Et"~~J[IE,~1IfH"f*~riJl*g(~8"JnfML:t~o3.2.4*~xt§~12t*~8"1!lt~tt:HJtJ[5E,£1JT~Jl:.QJ~~:ff~B"J~~~~m@~~~,!JsL*~~~~~~**fi@~!lt~o3.2.s*fk-1£tHiSl*tlfI~)7~§~*§VJrn,Jft~·~pg§~*1}~7~f"Jt·:(£H~fJ!.-FF~s-rm~~~1$iA1lJ8"JilEtf&"~lit11:jg~Njf~Xt~*1f*~~~~~*~~-;~N~~m~~~~~mw~*"lf~t~~;tt~fl~~lt_rt:i1!Jf.?t"~1Jl,"JXf,m~"AtstDsilla-tm~If§~~1~,1J7tfJfjtt~tk:1"6JR:2M--r:fr~j:*fmo3.2.6*~xt-19:***§5~~t~~8"J$r:UHtTtJl!.5E,n-·~11Jl~~*~s1t;JJ,-!ff~14__~*xftf:f~>t¥~,f~Mi$~mic~,f~¥1J1=1.1mPl"~o3.3.I1±ifF~i~~§#&8"1"rff{R.--r~ffi-.1JN~i&1iBt,·xt19:tr@~f911%i¥J1lTim"ti±~*,fkxxtjt1"F-~i1ti~tH&,JtB"~~>R,r?JJie®~-~*11fi1-=i:-Hf,m~t~,m~**Pr:rfftryi1A0i&1ijfilfft~~!JsLJI;r*~J[f[8{]~J[5Ej~,ffJJsLJI~(.Iti~i&g(~I.fi~IRAf[IM~m))HG2O2O1Et"~If§~~J[JEo3.3.2,3.3.31J&~ll~i5l1k~Jm,r::k~N1i,1-*fH::k-.1lfi£,ffOC~,:t£rm"i-=ttJN~8)tfirm1~m~iiJllUJ$8~x*__1trx~E.m~tJt~19:J1tl!rm~J1lf,£fxt&~A.fJ,VJ~@JJX:A.~~Nf}tMfjjo3.3.4*fkxt"m7fflffN:~tJL~~8{]1~ffl&)=t:1till".i1fitiLIJT&,~8"1~*,£11T1Iffl1*i&*~~8"-J1i:~o3.3.shf.~ttlo~"11Et"~ftloc~-m,~mJM~~:@:f±f-Jt~JM~mw"*~if1=1i~JJR~!8".J·Jf1!"EBTJt9&~1ft*~If§xq·~~"*~tiLUTg(~f~mi!fitt~It8{]ff~$JJflo•60• I7"1flrtlfFtiHi1~,Jf~IB19:*)ff]I~Ift?:2:l"BJ,fit~~~~~~*E8A"fJL"lfJi_Tfijfrm89~*"ift*JE{ftBtmfffi~~1=cffl~ff:2!"BJto1*f"f,Mtf~218J;41~iJ3.~d:tz-:N*lk~~u-19:*~JfJ!,rtrfWN*,£1nB"~~?&~=&*m~~B"~r?JJ1~~mn&,x1tt1118"1"1"1:tm~ufU11~*,m~§~=&ft~~~N*M~~tt~~-o*~~mWN*~~~~¥~~~~~*~ili+~~~~~f"FW¥*E8~~03.4.2,3.4.31ifiiii~1:tz:i5t*~~/Ft£¥fiiliJ:~~,£*f~~frfill:bfJ:~il"00J:_fit~~?&,f1sl.lltJtJ11J:x1·1£fill±¥_L$::.9£toffE1rmJ:$::~8019:*1£tHT~~8"1~:1(o3.4.47"1~11£N*~Z9JtiJ~t=t#N*tffoc,Ilff~1ifti-vffl~19:*7j(+,fflJj(+{~iJiiJ~19:fkJk+891Irt~oT:C1)~~7j(Jf1Sl-Ji!£Ji~:.TfFFl"J-.,1~t=cyfilf.g5Efftic*;It{ftJft.,fr1*!ltjjjf~180°,1#t=cyfil{~ll:Bt,_!=j0°Bttt~,ftiti3!~fr1I3f-~~:JJ*J;c2)f$Z9Jx,Y,zj:$t!J,1~Jt@IV3me~,w~x$f!J,Y!WIf~~frfirp,~;c3)~7j(-f-15l..~"7f3-Ji!£Jftr.T.fFi191!k;(4)iJ~~JffLJJ!fJt~~"~~7j(-+1=cyfiliftil~1i-rrBJ"~;cs)f~Z9JY!WIrmufirw,J§Jm,~,*tmJm~7j(+1>t8"1t=c.rfI:IErP1ifnlm±-tf!JJ!JJ~Jti;c6)N9!stIft1JrPJifffJ~~1fil11£~8"1±-ffLR!Pt~ti,il¥1JfillFnM,~8~x"y"z-+007j(-+1><.fr1/4*~I))~J"y"z-+1fil7j(-+1><.{f2t~I))J*J;C7)iJaJfl5GJJXD,~Y!fffif$~frfirf1~tit,X,ZJJzY,Zf00J~8"~7j(f15l1=crfilillf£"i1~{ilN_;c8)f$~1Y!WIM,9=1,fri·-:,~,r91uit~-Jc:&u~L],J2ti;cg)fJ;Z9Jxttrtrntr,rti,!§-_,~,1m1Jitii*&m7"l2t~;c1o)fitl5E±-tlLBtflt~fiJ:8~ttYi~t~-BJ:,Jkfifiilm1C11~o3.4.sjJT1~iiE1*fFst8"9~~,*~xlf19:*8"1~~t~.tffLf"Ftfj~~;E•61• c$:~t~it!!!=:J~JJffH-E!.t~±tf!.~rPJ)0xJ-T*~J1tJL..~~tJL..mittJL~1J~¥~~*,~*~~~m-~m~~~~~~tto3.s.1*fk~LltHT1~~11?&j~F~*~fJL,foIfJC~x-ii~1ibI-ffl*8"Jff*!..z;JJ11..$:~~nfil:~iim11*~ft-,R~J!~~~f4:±1JJi*stJJOJ:itt1i-tJUfiJIfJCt~ii~1io3.11~iiE~Im~miifill=(...1E8~lkt)}~1sttm,VJ~n~Ji&*J;JJtm8"1jf1t1:£ffl"t~ff~~1*ElT.zf=(f*ill1ArmJJZJ1!fr-*183-.~i~fO~~Jfff91J~fL3.5.211&~Ji~i&it1P"tx~~B"~r*J~§115:EE!.~~~f§firJJ~LiEii}fl,~~~-=f@$~..m~o~~~~~~11J"Nm*~~~$:~00:itt1·=r"3¥~~IL91Jj_tf.1JD15K1?m:tifil"~~xfilE:E!.£~*}jtJNW=fff~~~it03.5.3··i)!*$:~ti:i~IJiiB"Ji*J~~:(1)g~~Ft!f~fliITTIJti:.DY~~g~~l=£L~J=l1~1Jii1Sl89-1EHi~:t~~i&itt§t~~,int&~t~-~iSt1§-ifJL"if:.,-r&~BSE:E!.~~AYffij-!=:JfJL1f.Z!"BJCf:t!1mt7fJ::..it~f:tt:iffi1trl!l.)J:Hg~t%.E:E!.~fl1~1Jii1Slnfil:1msoovfi1frEEE!.ffi,~~1Os,:ffg~~~~*EI~7~$1*Et!}!ffij-=f!j;fJL"iCZl"UJ8~g~~f:t!~J=ltEJE"~7cf=.~1-"tT~fW:1b-TlOOMO,1±1~r~ff~~{4T)JYjc-T2MDo(2)ffii1ffiY~~iJ!::~#fffii1J±t~ljii{)lB~~ffi~:f~~i3l~t§t~}lffij,t~lfil~:t~~iR%tifJL1f:,ill1-=rnu1f-=F.iftl~ii"I~1~m1f£[-k7G(~~)14BSf:t!-=r-..E:E!.f=.E:E!.~~Jj~~J[j£7~,N~F-t!it~tfuuAYffif-=r--SivL7tzrBJcEE!.im:ff12.!t-Tt~ii11Lit)-.~-g~g~~*8"-17~$"fffEt!AAij-T!=:JifJL%z~,~&~~~~~~*~-~il!~~m~z~m~~~~~~1JtE:E!.sl!locoiR*:tJtEftslil,§t5iLt-rft<<19rnit..~i~%uiJ%7][mi=g~i5t~B""1$:~W*m1$5t:illiffl-~>J(»GB4793.lB"J*J[j£0·iJ.%1st,/FmtJ:1:.*3¥..S~mfilrAJ**~J~~0c3)mt®f:t!1frEi~uii:~ff~f:t!ffilfH:ct*Jl!.J£8"J~~~&mc36v)Bt,Mffl-~$:t~T15oonf:t!~J=l8"1rt!1frE*!=:JN~1*±fil~f*$10(!§•62• ¥Y!~iiN~~mt1AiEE!¥fiI,/f~Jcr5mAo3.5.4~1J5if&fliY&1:f:N~~~,mt~380VW:220V5":1fiIEt!tmt~EE!oN~~A~~~~EE!tmt~mtt,~~~N~~EE!tmt~ffi~~~~~~~~~T~o~~~~~~,~~tmtEE!ffi~~JEm~go%~11o%"Et!ll;~~j}f*tr:~J£m81.J9s%~ios%ml1filpg1f:ftat,N~Iii~JE~Jl!.1EITTJli~~t~:f~~*;-~EE!tmtEE!ffi7"1tm1Em81.Jso%at,N~ill~~_I~c"ti~~t§":f~ftifT~iO~Jl!.JEm);-~$HtrAEt!ffi}gWfJ£m81.J11s%at,N~/fm=r_m~03.5.5N~/filltc~~t-91rAll:!n]fJ1til"L"JJ8"~5Inu*J8"oxt~·~&#J1Ju*Fr!)J~~xf~{!f~tcF1:~n(n]ITT19:~,u*?=r1~~iititFJEi~Jl!.tl1~ft~~A~~**fioill*fflF~tt~~~*~OO~~~~k8"~~±ill~oc1.2m,RE~~~1m~it.tfri~~n*%1~1JiJoFr~itfflA!~~""tlift~,?.~J§it-~:f5Jmo3.5.7~4~~~7~xt/frPJ_TZ::Ji~r=f8{]~1ftfILN~iB$2?&"~ii&ii~fi~~*~WTA~~JEo•63• 4~m~~~~~~m~fi~mI~~ff~~"ifPJii~ii~1-r4.1-M:~JiJ:@4.1.1f~i"Ktttj;~~~~¥t&iM@IL:~tEJ!J/mI!:E8¥1ittLtLt~~*B""1,~~B"1wJmI.t:1f*-mB"1___±V=~~~i;pittJu..-Tii..~nx:,!!ffBnx:%E8¥fi_tJl(ljiff1JDI.miflt~~IiJiEE!.~oITi1f~r!Ji;!=:~J*iJ~IZB"l~~~~w~~~~mm~r*~B"l~~,fim~~~~ff-~~nx:~~!iiiEE!.fm0ffi-T~~I~~fflB"li9:*¥*ffi~,~~*-~~m+:~~~~w~~~B~t£-®,mm~~~~~~&wfm¥~l¥J~~1M:@_IZ,~p1J1EMTI1tlw..~~wtr:tL..i~:fLlJ!ft..~~~fpittJ1J..~J1..filff..:tAtJJ"ffF~~ts"fP]Bt~IB~LB19:~-trm-Tf~iliA+:~~~IL:B"~t~J~"91jt_Uyf,IMVl"tJJhtJL"1:~trtLtJL"ififttrfLm"ilfLJ:J{ftfJL..~~~fpA1J1JtJL..~J1tJL..~DffifilffitJL..1AtJJVL..ff£r!Ji;!=:~~~~1~ti~?..WJ~J~t~df..i~fti)li]~iim~12~±~T.Z:-~~"xt~N*B"~$:~~ii~fr~*f"Fl±~J!-1*.~Jr.J£04.1.2*TIfJT¥&~E8¥~Hi1~~1f:iJit7"t-T¥&1~,3Dl!I1~r~~it1~,nrm_T~_w_illl,-x:xoo~~tr~"Jiitx.04.2.1*~~Jr.1ETrfiIMtJLB""1~~~>j(o4ffi-T11itMB""l~1trr13~~tf"&_..g~~B"~m1f1J~5-t,fto7G7K~M~,f1T~~>}(¥fiI~~~1ili&,®fF~~:k,:#$_1ff£¥fiIMJjQ~iili~11:E{!j(ft~~"f)jijf*/G~£1:51~#&"51ii-~~~l¥JJi:~11t~0*@/gs!iifMtt~@"19:~12~1*f"FAff116~,mFif~1Jv1~0•64• 4.2.2*5k*JlDi:T¥fitfilf!LEt~iffiJhtlklit~fr~>1to1*J!JHJ~"fiEtJftit~&*m*J!Ja"J~rPJ,moo~mJ:t+5%04.3i)JJ=tfJl4.3.t*~*J[5ETtJJJtf!LftJ~Y&~>JJ(o1jgJ)}JJ!:110IiitirpA!!~4?JJ1*litAflt~I~IKIE~~flJl1w1%,~ftIRJet§tl~itft]~*mWC*H-fafflJ)}J1?Yt-o4.4.2*5k*J[5ET~~tJJLfJLB{JiJ~hlkh~1-T~>Jtot*miJt~fffk14,x"f~~Jllit1-TJ:Vi~J][~7"JTWiiER-t~4.5.1*~*J[5ET~J"ttJJLf!LftJ~~~>JJ[!ET~~rxxJfpf61JtJLB""1~~JI*o2~~tl~~tJL~¥~~~~&ill~~ft~~*+®k,~iiifl~~Jk!littftBt,1tf!~~1!jifi;31,V!IJftfpf61J.TftFtfITif1JtEJ"~1f1t:~:ffl-K450mmEJ"~JJLlJ~~~-JJ0.04mmB"JEl!~~%JJIJrff/G~fflJjt1frPJ$£[-fftfpf61J.T.fti1__t,*El!"fl.~ft~1f(rl]k10/G~~JAJJCJT~EEtruf-11,!JlUfpf61J.T~fF€tB"1f00Iitrf~04.7.2*;}t~JET~~rxxJfpf61JfJLB""llJHilkii~frJl*o3fpf61JfJLkill:ff--~1"mf~*,;It"11tEfpf61JIfti1_till~~1"t!f~*"PT)tJJljj!{r~j:_~hh:r~fJJ-;f;T~-~~JE1ilfL1ilfl."m_1"ti1i*$L{£_IfFf=t"T1f,QJJ!{rt£fp,ffi1J:tif¥9=1~~rxxJ5itfJB"~3£1-t,3fPT*ti/G~1£1t:ittfrf~f~it(lE~iif@~fpf61J~Iio4.9.1*~tJlJET~f.ftffi&:fffJLB"J~?&~>llto4~tt~JlfJL~J1J§B"J~&:1:.~J1PT7!710&:,_15&:..20&:..25&:EtX:30Ji!:;6Ji!:ffFoB"1~-wt±~JfJJt1JrffWIEl"~1:.~~ff)Ji,~f.liiA~;ItJ1!JllC§f~)JJJJt~~1ftJi!:~~JJJJtzfJJ,~~~~:fftHA,[251litftit:ff+5%B"J{;&:0•66• 4.11.1*5k~IJET{l£mii~~~1fi113t~~fii?8"~$:~~*o2f-ft:·~~il!/G§~1ftt:iit~iUi?~B"~f-ft:~o,~JJlU~mmi?~1~3R8{]11!Z}J04.12.2*~~~]£I~~~~~fii?8".JiJ~liilkii~11:~:*o6__~~~{~8~~.r2:7tJ)rJIE{izft1-~:i!wj[It1JrP1_t~~tl®TrnT8"~tr:-.rp-.ti.5zt,~lf1~*wB"~fritt,!fttfJ~.~1?1flilr4tJ~,~>Rl!__.~1?r]fratJ~.xftn=B~strBJ,gB"~rh1rocm~0PT§~~t#~iX,~iLl~*04.13.1*~~~!£Ti~YtiJ~rnfltJL8"~1C?tt~):j(o2~71ti]i1Jm1;fJL8"~$HtrH~11/GPT~Jt"fto*~Hf{11*~~xtAITTf.!ifXXJ~~illm1M111,bZiJi1Jiift+1C~~1?n,192;lttfi~f£~tH~J1t:ifiil~listPTrt~r~L4.13.2**~IJETj~Jti!nJ~litJLEJ"~jJJiiEc~l~fr~*011*"Ft-t~~YtiJ~l~JitJLffl*1,V!IJiiffri!nl·~1"~~li8"~4ZfflI?&,~fff-ffftrLUflffiJo8"~fPifl!J~Ifa.f&_t$:~MT$*¥~~tst1*tto•67• smn~~t&*~mI-Z:W:*~~,iJliiEciile1J5.1.1r!flmI!:~1£Bm~M8"J~Jl_t?fEfH~~EX:~~ftir!fmo-~1£~Jt_t~~~~ffi-B~mtt~,-~mffl~~tiflf1JBUfB~f*fJt-LJ!.LI:lJ~;f§~-,-PJ"ftJ~~~Lt,~~tYJEtH,1t¥1=.;f§?YEfHIt:fO~.Ll:lJIZ.:B"J~ftPo*~*m~ID!B"J1"~¥tli1rtltlmIt:iiU~"ffPmtJJXWL7~"£J=tr~tJtJ1J!X~t#-Tm,~MSitMc~!Jlj,i1J!:t~rf$)(~,ft~1JA1It&,~1JMtI-*}Bt,~fJl,-*1*Ti,~@1tsrtJfJ(~,Yt~LlAl&h&,f~t!R~-T~---*JR,rPJBt~-m~ili~*4Z~mTr.w,m.I!:8{]t~-~"~ljtfjTMl~~MtitWttfL,~~~"&.flWtfJL,1t¥1=.:f§?A:fH*YE,tiff~ll~tli*t1E,HifttJl,_&,_~E1,&ill~-T~U~tJL,1t¥tJ1*30CM7~fJL~8#±~_IZ.:i9:*,xt~~*El"J$:~JliA~fr~>RfFHi~f*t~5Eo5.1.3*-~w1Wrtt1lB"~r~"JiJ-1:x$~=nfmI.Ji~i~m,~~J¥1ftl~ii1:x,IJ:l~1t:i~mo5.2~t~~~tWH~*Jl5.2.1*~tJ"Ji:TM!~~~tllf/mtJl8"J$:~~*01~~~M~**~*~~~*~~~~~~M~*--M~~~~M~*t1l~~-Tft~M~~o5.2.2*~t~JET~~~~tflWttJLB"~iJaJiiJlii~1f~*o*,4~~~M~**~Mre~~~%~m*~~oom~M~rPJtttBre~M~*,ffillmrecs~tfft)1J!Mi9:~;12m[9fl%reflJm%re~~tBt"-~=L¥h][1?:JjTEX~T•68• lOOmmst,;lt~]J:ti]~"t"i/Gill7cr+3%;~¥Jt1i127cr100mmEXm~£Jf3~tillrlJ$JB~iJ11tMst"!tij~JJ:ti]~"tiillfr19:*19!mi#)Jfj~9=1Ji1*~Jr.JE05.3.2*~~Jr.A£T~~~ti_~~~fJl8"Ji%Jii,&ii~fr~*o6$!_~i!filtf:Jl~*B"9lrBt=cst!"SJ,VJ1f~QJ~~±-tf!M~~Wt~pqs"J~~~t=c1*o9I01I-;t-"1B.~/;r#Rit-HL#tB.~1tA-t--=:P-wA~i:brti:t-frtAdt"__...--.._C."""/X.1.JjtJl*"[J1!i:;-;n/_XJOJI"JJJ:-.HJ)J/"J"t!,f"_liJJD"""""t!,-=r*11o~,Et!~11tuEt!-=F*110~,~m-to~,ffi:Jttw~~,Et!-=r*~!i~B~~~~tt*,ili~*~~tt*~li~ili~T~-TJf!~M~litt*"~~~~tt~~TJR~/l~Jmi9:***fi~~~o5.4.1*~~~JET1t*~t§tJEfR*~JE8"1129&:J{)j(o1§ftJ~111EB"~1t$:~t§tJEfHtt*~"Atff1t*~:f§tJEfH,{~ffi1t~t=ct§tJEfH,~~-T1*±~54l1t~t=c:f§tJEfH,~~~1t~~~~ffitJE~~,/Glrl]~t;Emtt*~T~~~~ill*~*~~/GlrlJ03EE-T1t$:~t§tJEfR*tlEIZ~1~ffl~ljSiH1,PH1,SF6,CH(1,CF6~g~~,~ii~X1A~/ff$89fit~N:"ti-~~,7g&:iiE19:~~ffl~~~A~~~,~~~m~~~~~~~~~~*W~~o*~7"15£TIJiJ"ti~~,-t&*~9&A~16,@!.Ft~tttffo57"lTi*iiEt~fFBt~~~,fll"if.rlsi~Pft1:2Jtl!o5.4.2*fk~Jr.~I1t$:-~t§~fH*tJE8~iHfJii&i:B:~fr~~~*o2$_~itfilff:~~*8~MI~Btl"ElJ,VJff~QJ~~±-ti!1ffif*ifl1*pq8"9~~~1*;8/GrPJB"Jij~#~,ftD$~fi1,~1-tf.J1,~1-tn1:~,~J=lpg,J=l!"SJ,1tt!"SJ89t1J~"ti,tJEfJU!~~JiJT/GrPJo•69• 5.5ME~.&i~t&~!!C551-k~±mJ-~yti!-:,)L>.Tl~itt±i:.~ft_±;.i"-thr.7~*llII-d::••/-i--~5K~JtJEI.YEm~IX,..,1zx.7F.-:JLJ::t"J7:i:.:::o<:~-..-s"-o119:*807j(f-1iti(~nfU]¥0~J!nJEiiimN~~~t#J:J&1~JR8·~~JJtHJ~Jt:E,l29llt~JJRll(JlEl"B"~?Kf-~)C]!~;3-A~llJl~1~-~~¥0w·it>7~,~l!nJEfi};__e11m!JC?&nr3B"~rwtft$;6w*f\iJl1=f!*frEh1Jfdft?&it,r~Jl[191(Et!.JiBJ:l!JtStH~~Jl$o5.6Hi**ll5.6.1*~~i/ETlliYttJL8{]~*~>Ro1wilJM~a,tToomm__t~xm,i:;rwJlt2~z;J1mmIEt~Yt~*mtffltFtiJ1flft1$1ft;21JiitiEJt~1Ja-t:J"t~1J551Jitf~rt?J8{J:t:g~ti,Hft~rjft&flJ¥Jl~w-t.t~!R,x1fM~JtIDit,w*!JX.?&st*J1F1mJt+;3i»~YtYt~&atYt:J"t~~,@f~1=frwt?n..a~f~f?*fl,kA~~~1fAffi~mm~~~:@:JJJ:m~o*~~~~tt~~,i9:*i*1fAV!&,;grFt~1A1-To5.71m.~~5•7•1"JV.asvJI"~b.r=tJ~~-=i:::J+/~:n:.11~"l"t=J~R~t1Ji:,x./mJr/,i=r~.l:i~J.::::(5(t)t-t:Ef"fl-&..."Y-fo"*IJ/--fo+/~"J.!J..!.F£--_f:::J..fil~-;h-"..±..r::?V"Jrh1)".JXtfill!.~8Jt1lim~mttliiXEUJ%B"lx*..mx~~m-~HLtJJXNn~,/G1-¥J:·f~*3AJJ,~fR.:@:mA5rEX:w*tffl131o1tM~atrwfi~14,/G~~1rtlfl[iJJ,J:J~iJJl$14tM~o211f~-tiE_1Q.~8".J~~"ti,!JC?&atffil.2:P~ftm~7J<+~~03rn*t~Aff!11Jill.~11fft5t~!fl:.*ftpJXt*m,rwJlt~1fat-®.~~~A~~m*~M~m~mB"l~~o5i3l*Iff:atyr.~8~7cii_T.!:i7J7j(f#i]).atitt1-Tftp-Ji~,I!:.1737J1~o119:it8"1IfFgil14CJi~~OI"¥~1£~)1lti~~~~tr~$ft:Ji1:~:fl~~IJmrm,19:~fJL&at*~rt,~Jn!J~mtmFI,~n[UJ~m8"~~ffl1ffiPo6.9.2*~~,mJ£TffrgJtmmB"JiJttHJffi.·i-i~fr~*03iEHJa~~*FPT~m~B"J~~ffin~ill~T~,{Ejcf=(ffinTf2i*t§8{j*itn~~·~~1~{:£T~**fiB"J*~Hr!~_t"~~itfil~~~~~~m~~,~t£7tm~~*-%~~~~~~tt~~mfilt£xt=c&nf)fJili,-=p~*~B""lwitn§~fiJ$~tttr*,·ifiL~P*1~~~*,:tf~~Jt~*~WitB"rar3tt,r?Sfil~1~m~·I+JC*,t£19:~11jijiAti~~fB1~¥UnJ3f1~J~zlW~~*ii~iXfffaJ!.~*o~Jn!J~:@~~~**~~i£7c~ffifflili~m~Tft®~m~~*B"J1ff~o4iJ:t~Wroc~PTti~,~Jn!JPT§~:©:mWit~~191111,~n[UJWit~~*o6.11~*~*ll6.11.1*~~J!.5ET~YtmtJLB"J~?&~>Ro17"1WilE~J1tHiE1it~tfj~7t,_Ift~i*:imAIWm~ilE~~J3t;6aM~7t~x1A1*mnxJM1%,lEllltN*b1$:~~7t~1?llo6.11.2*~~J!.5ET~J"CmtJLB""1i%JiJhlii~1i~>Ro1it!1im=t4<1*ftmM~1(1t~1?rmll,~~~iiEm=t~tstiliB""lsElYt~~i"J1%AH~;s~JiirmB"1_Iftt=c1*t~f9tl,1,,~~iJE~J1tffs"J~tBr,JJ*tmit¥U~J[5E~>Jto•74• 7.1-f.N~.m;E:7.1.183r1~g1l?&It:~~~"~-Tt:i1~i=ft~Ff~~Uii~*iiEtr-libmtii,~E8rff!um15t*rmt£1~~11~*~1:F~_t&~~m,~lit*~¥.fiff!UiJl)[*1fl~£!!JfJtLlo*~*M~~m~~~~~~~~~-~¥~~~~*Iff8"J~~W~>1<,¥f&"11:§~8"1f~iff!U~>1<,kA&£~gll~it~I~8""1f&iff!U~>1<,rllJst~mt~iY!UB"~&,~"1:£tilN*rJJ§~8"J$JI:1-t,JfjtHT·isfti~Wii*~"F~f3mf&~u*~"3DJ1t~~u-=1:x."§~Yt~fN:~f:X.,~Jtjff!1J1"-1:X.,XM~fN:if1:X.,~~JtWItJJfJI!JI~mh~iitt~7~~~It:~~N*,~*l)[~B"J~~&iiili1-TJl>1J:Ko1n11*iiE~JtrJ!uJJ1Sl8"J1muitmoc,It1~uiif=trmf1lJi!£fi-r~lill,r?1J11&*rmJt··=f~Jlill~o7.7.2*~~~~TX~H·~~~tt1Sl8"-Ji~liilk.ti~fr~>J(o3nJMirexM~m~xrj·Af*m:~m~,x~t~~**7fyg~&m:nffl1¥i)[*JJ:.~n9.t-r*1~~~0*mx115£TI1tltt~~,~*iJtiliiA91&@u1u:ttltAfr0•76• 8.1.13t11~1JFLi&~t~xtj:_FN*Et~~?&ElWC1j!C~xB"1J9J::!t:ittqiif~i~UfQi¥5E"*~PfiJO}jT3t1ji~i&illJl.*8{]~1408.1.2~-T.~i&~t~1£N*-&lf!Lfll1*~-Jit~qiJ§"xt~FN*ii*;tifm:Ittqi~~,if5E,*~Pfil~T~I~i&illJ!.*Ef"~~14oN*ii*t~t~PJtm~xti9:**~EJrfFB"1~*,mPT~~~illLttiJ-~qiFoxttz:rfbB"J·fi~~t~t~1~Hltitt~~~*~iiEi9:*117Kt~f~irif~~~o8.1.3niP:I~1JiJJl·iTR"1J1f83-T~i&r_V!§~rPJ,Elf~El8"1~i~U1Sl~f01J-~i9:*,1fM:PT~~~J9T~rPJ,1.ET~~A.93.ElN*1Sl~UIJYJ!.~~~~~J9J:0*~E1ft~B"1M:5Eitji~5EmttJ~t~J9J:jltt*1lit1f$n1&1!Nfl~.if~tXJ!flJt-~J9J:ittt*1lit71-$fl~ll~R~-~itif~B"Jit-~)EfflftJ*0~Elf¥&ElB"J:®ffl~i~uffJl.~:c1)!fJXJ~R,i~ujiWI00:co~5)m,liliJHJJt:1mmo(2)Vfff~-FR,1m1Jit1[00:(0~300)mm,lififfJOC:+0.02mmoc3)11Wff1~tlii1Sl,1~u!IWI00:co~5ooo)v,liliJHJJt:+1.5%oC4)~fg¥%.Et!~_fi1~tlii1Sl,~tliiWiIII:Co~soooo)Mn,illiJHJjt:+3%ocs)i;tf%Et!?fiE*-,i~tliimIII:3trfiEEt!ffiCo~600)V,Iiiifijoc:+C1.2%+5);3tyJiEEt!yf,ECo~400)A,11£~]Jt:+C1.8%+5)o(6)~~~Jtj~,1muitWIOO:(0~750)VCAC),{fiifij]Jt:+Cl%+5)0c7)fffJ~ifil.1Sl,~tliiWIli5J:co~so)kg,liliJHoc:+s%ocs)rJ&c0r~)ocit,1~uiimfJI=rlifroc=c-zo~4o)c,1tlifHoc=+i°C;r~oc=co~1oo)%cifElxtrlIQ.oc),11lifHoc=+s%cifElxtrlIQ.oc)oc9)~*F"~it,r~uiimfiI=c3s~13o)dB,11iifHoc=o.1dB0•77• c1o)t9*,r_m1Jii-moo=co~999)h,1t:nftJoc=o.oo1s0c011)tt~ifi!ocJfil@It&r~ufx,r9!u11-m~=c-2oo~16oo)c,1f1iJijJi:+0.2°C0c12)-=f7tR.,19!uJimml:co~1)mm,lf:nfflJi:+o.oo1mmoafil~fill:r9!u1J~at,r;g_~iiE:Ji*t~t!FiiFo~11L~~{~~c"fitm-=11LvJr*J)t&r~uB"1IE:nJH"Ii,*m~u:1:1SlH,ii~B"~~"J1xmn7"1~~~~*fjzm8""11I1ooiiJc~1Jiii*~c§t!1:>lffiR~fr1iflJilJi*£)FE_1Jr~1,m1Jxt~iR£ftiftilB"J1;3oxtT-1~uitfffJJt~>lt1~~s"J~1JitrJ!EI,$i_ii!fr$1J<~bi*fim~omftW~I~&*~ffibim~m~1JFL~om~!]]Z~n~~1JFL~~*m~~~~!]]Zm~mo~~!]]Zm!]]Z~~£~~~6,~~r~Fnlfi/G§~ie~~¥Ui9:it!1X:N*tt*x14Et"9~$~*,{O§~~,@gc~5flJ{1!fflW§~,7"J~~JI!:fcEr~:fff!~,ft/G~OfUJgc~fil]=:~W§~~~14--r,-aJttt!l.tl_ltt*1J~#Ji?}}i~X14i111-T~4~,{EI~{f1Jbijf(tS~~jf~{fo8.4.3¥=17tJ~Tfiff:ftFJ!mtii~~5,~2JS.1~Fn1JJ~§~~,@t£§~~>J