国家标准：GB 51037-2014 微组装生产线工艺设备安装工程施工及验收规范

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Contents1Generalprov1s1ons·············································(1)2Terms····························································(2)3Basicrequirements(43.1Constructionconditions·······································(43.2Equipmentunpacking··········································(5)3.3Equipmentmoving·············································5)3.4Equipmentinstallation·······································(6)3.5Equipmentdebuggingandcommissioning·····················(7)4Installation,debuggingandcomm1ss1onmgoflowtemperatureco-finedceramicandthickfilmsubstrateproductionprocessequipment··················(9)4.1Generalrequirements··········································(9)4.2Tapecaster···················································9)4.3Blanker·························································(10)4.4Greentapepuncher··········································(10)4.5l...,aserpuncher················································(11)4.6Viafillingmachine·············································(12)4.7Screenprinter················································(13)4.8Stackingn1achinc·············································(13)4.9Isostaticlaminator·············································(15)4.10Hotcutter···················································(15)4.11Lowtemperatureco-finedceramicboxfurnace············(16)4.12Thickfilmbeltfurnace(17)4.13Laserresistortrimmer(17)•4• 3Installation,debuggingandcommissioningofthinfilmsubstrateproductionprocessequipment············(18)5.1Generalrequirements··········································(18)5.2Magneticsputteringdepositionsystem························(18)5.3Vacuumevaporationcoppcr-coatedmachine··················(19)5.4Chemicalv<:pordepositionsystem···························(21)S.5Spincoatingandhotplatesystem···························(22)5.6Exposuremachine(23)s.7Developingsystem(2"1)5.8Reactiveionetchingmachine·································(25)5.9Chemicalmechanicalpolishingmachine·····················(26)6Installation,debuggingandcommissioningofassemblingandpackagingprocessequipment············C28)6.1G·cneraIrcquirements(28)6.2Dieattchingmachine(28)6.3Dieeutecticbonder·············································(29)6.4Eutcctic()ver1•••••••••••••••••••••••••••••••••••••••••••••••••••C29)6.5WirelJondcr···················································(30)6.6Flipchipbonder(31)6.7Plasmacleaner(31)6.8Selectivespraycoatingmachine······························(32)6.9Parallelscamwelder····························..············(32)6.10Energystoragewelder·······································(33)6.11Laserwelder················································(34)7Installation,debuggingandcommissioningofprocessinspectionequipment·································<36)7.1Generalrequirements··········································(36)7.2I)robetester···················································(36)7.3Acousticscanner·············································(37)•5• 7.43Dopticalprofiler·············································(37)7.5Automaticopticalinspector····································(38)7.6Laserthicknessgauge··········································(38)7.7X-rayscanner···················································(39)7.8Chipshearing/wirepullingtester······························(39)8Engineeringacceptance·······································C41)8.1Generalrequirements(41)8.2Handoveracceptance(41)8.3Completedacceptance(42)8.4Disposalofreject·············································(43)AppendixARecordformsofacceptanceformicro-assemblingproductionlineprocessequipmentinstallationengineering············(44)Explanationofwordinginthiscode···························(49)Listofquotedstandards··········································C50)Addition:Explanationofprovisions···························C51)•6• 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